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90VZVNVXVJVKVQVGVM · VCVBVUVH · VSVYVUMVRLVVV真空発生器真空ポンプ対応ユニット真空ポンプ真空パッド真空関連機器技術資料0.160.220.280.340.40.460.520.580.640.700.5–10–20–30–40–50–60–70–80–90–100–10–20–30–40–50–60–70–80–90–100供給圧力 (MPa)吸込流量 (l/min[ANR])到達真空度 (kPa)真空圧力 (kPa)流量 (l/min[ANR])VUMH04真空特性流量特性0246810121416182011.522.533.5供給圧力：0.5MPa到達真空度消費流量吸込流量012345678910–13kPa容積 (ml)真空到達時間真空到達時間 (msec)50100150200250300350400450–86kPa–80kPa–66kPa–53kPa–40kPa–26kPa–86kPa–80kPa–66kPa–53kPa–40kPa–26kPa①②③&④⑤⑥⑦⑧⑨0.160.220.280.340.40.460.520.580.640.701234567–10–20–30–40–50–60–70–80–90–100–10–20–30–40–50–60–70–80–90–100供給圧力 (MPa)吸込流量 (l/min[ANR])到達真空度 (kPa)真空圧力 (kPa)流量 (l/min[ANR])VUML04真空特性流量特性02468101214161820供給圧力：0.5MPa到達真空度吸込流量012345678910–13kPa容積 (ml)真空到達時間真空到達時間 (msec)50100150200250–66kPa–53kPa–40kPa–26kPa–66kPa–53kPa–40kPa–26kPa①②③&④⑤⑥⑦⑧⑨0.160.220.280.340.40.460.520.580.640.700.511.522.5–10–20–30–40–50–60–70–80–90–100–10–20–30–40–50–60–70–80–90–100供給圧力 (MPa)吸込流量 (l/min[ANR])到達真空度 (kPa)真空圧力 (kPa)流量 (l/min[ANR])VUME04真空特性流量特性02468101214161820供給圧力：0.35MPa到達真空度吸込流量012345678910–13kPa容積 (ml)真空到達時間真空到達時間 (msec)100200300400500600700800–86kPa–80kPa–66kPa–53kPa–40kPa–26kPa–86kPa–80kPa–66kPa–53kPa–40kPa–26kPa①②③&④⑤⑥⑦⑧⑨消費流量消費流量※真空到達時間グラフ内の■の帯が付いた①～⑨は、配管チューブの記号(配管長(mm))を表します。　詳細につきましては、下記をご覧ください。　①UB01810 (L: 500) ②UB01810 (L: 1,000) ③UB0320 (L: 500) ④UB01810 (L: 2,000)　⑤UB0425 (L: 500) ⑥UB0320 (L: 1,000) ⑦UB0425 (L: 1,000) ⑧UB0320 (L: 2,000)⑦UB0425 (L: 1,000) ⑧UB0320 (L: 2,000)　⑨UB0425 (L: 2,000)　⑨UB0425 (L: 2,000)