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)]RNAnm/ℓ( )]RNAnm/ℓ( ⑤[i⑩[i00②③⑦⑨⑪[i[i0123467901234679)]RNAnm/ℓ( )]RNAnm/ℓ( ⑨⑦⑦⑧⑦⑥量流量流(0.5MPa印加）EQH-6M5E: OUTEXHEQH-6M5E: OUTEXHEQH-6M3E: OUTEXHEQH-6M3E: OUTEXH(0.5MPa印加）量流量流 OUTEXH OUTEXH OUTEXH OUTEXHEQE-3:EQE-3:EQE-4:EQE-4:EQE-6: OUTEXHEQE-6: OUTEXH④④③②②①⑪⑧No.①EQH-3M3EEQH-3M3M6EQH-3M5EEQH-4M3EEQH-3M5M6EQH-4M3M6EQH-4M5EEQH-4M5M6No.④EQH-6M3EEQH-6M3M6⑤EQH-6M5M6⑥EQJ-3EQU-3EQY-3EQE-3EQH-6M5EEQH-6M5M653510080604020250200150100500.10.20.40.30.5供給圧力 (MPa)0.6形　式流れ方向INOUTINOUTOUTEXHINOUTINOUTOUTEXHINOUTOUTEXHINOUTINOUTOUTEXH58ニードル回転数10400350300250200150100500.70.8形　式流れ方向INOUTINOUTOUTEXHOUTEXHINOUTOUTEXHINOUTOUTEXHINOUTOUTEXHINOUT100501112130.10.20.40.30.5供給圧力 (MPa)0.6形　式EQH-3M5E: OUTEXHEQH-3M5E: OUTEXHEQH-4M5E: OUTEXHEQH-4M5E: OUTEXHEQH-3M3E: OUTEXHEQH-3M3E: OUTEXHEQH-4M3E: OUTEXHEQH-4M3E: OUTEXH58ニードル回転数10110.70.8流れ方向INOUTOUTEXHINOUTOUTEXHINOUTOUTEXHINOUTINOUTOUTEXHINOUTOUTEXHINOUTOUTEXHINOUT1213 制御SeriesミニシリーズNo.⑧EQJ-4EQU-4EQY-4EQE-4⑩EQJ-6EQU-6EQY-6EQE-6